Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.

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Material type: Text

TextPublication details: New York : Academic Press, 1983.Description: viii, 151 p. : ill. ; 24 cmISBN:

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Item type	Current library	Call number	Status	Date due	Barcode
Books	Department of Physics	621.5/5 STU (Browse shelf(Opens below))	Available		PHY007505

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