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Nanolithography and patterning techniques in microelectronics /

Bucknall,David,G

Nanolithography and patterning techniques in microelectronics / Project Report edited by David G. Bucknall. - Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, c2005. - xiv, 409 p. : ill. ; 24 cm.

ISBN: 1855739313 (Woodhead) 0849334470 (CRC) 1845690907 (ebook) 9781855739314

Subjects--Index Terms: Nanolithography

Dewey Class. No.: 621.3815/31 / BUC

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