Nanolithography and patterning techniques in microelectronics / (Record no. 156051)

MARC details
000 -LEADER
fixed length control field 00854cam a22002297a 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20160323130331.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 060112s2005 enka b 001 0 eng d
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815/31
Item number BUC
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1855739313 (Woodhead)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0849334470 (CRC)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1845690907 (ebook)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781855739314
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Bucknall,David,G
Relator term ed.
9 (RLIN) 15524
245 00 - TITLE STATEMENT
Title Nanolithography and patterning techniques in microelectronics /
Statement of responsibility, etc. edited by David G. Bucknall.
Remainder of title Project Report
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. Cambridge :
Name of publisher, distributor, etc. Woodhead Pub. ;
Place of publication, distribution, etc. Boca Raton, FL :
Name of publisher, distributor, etc. CRC Press,
Date of publication, distribution, etc. c2005.
300 ## - PHYSICAL DESCRIPTION
Extent xiv, 409 p. :
Other physical details ill. ;
Dimensions 24 cm.
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Nanolithography
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Bucknall, David G.
9 (RLIN) 15523
856 41 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://www.loc.gov/catdir/toc/fy0607/2006365086.html">http://www.loc.gov/catdir/toc/fy0607/2006365086.html</a>
856 42 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html">http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html</a>
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Books
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
    Dewey Decimal Classification     Department of Applied Chemistry Department of Applied Chemistry Reference 08/27/2009   621.3815/31,BUC CHE3785 08/27/2009 08/27/2009 Reference

University Library
Cochin University of Science and Technology
Kochi-682 022, Kerala, India