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Principles and applications of NanoMEMS physics /

Santos, Héctor J. de los.

Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos. - Dordrecht, The Netherlands : Springer, c2005. - xv, 254 p. : ill. ; 25 cm. - Microsystems ; 15 . - Microsystems (Series) ; v. 15. .

ISBN: 1402032382

Subjects--Index Terms: Principles and applications - NanoMEMS physics /

Dewey Class. No.: 537.5 / SAN

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