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Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos.

By: Material type: TextTextSeries: Microsystems (Series) ; v. 15.Publication details: Dordrecht, The Netherlands : Springer, c2005.Description: xv, 254 p. : ill. ; 25 cmISBN:
  • 1402032382
Subject(s): DDC classification:
  • 537.5 SAN
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Cochin University of Science and Technology
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