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Optical Inspection of Microsystems

Optical Inspection of Microsystems - Edited by Wolfgang Osten - Boca Raton CRC Press - 503p. - Optical Science and Engineering .

ISBN: 9780849336829

Subjects--Index Terms: Image Processing, Optical Profiling Techniques, Grating Interferometry, Measuring MEMS, Laser Doppler Vibrometry

Dewey Class. No.: 670.425

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