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Optical Inspection of Microsystems

Material type: TextTextSeries: Optical Science and EngineeringPublication details: Boca Raton CRC PressEdition: Edited by Wolfgang OstenDescription: 503pISBN:
  • 9780849336829
Subject(s): DDC classification:
  • 670.425
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University Library
Cochin University of Science and Technology
Kochi-682 022, Kerala, India