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The Science and Engineering of Microelectronic Fabrication

Campbell, A Stephen

The Science and Engineering of Microelectronic Fabrication - 2nd ed - New York Oxford University Press - 603p. - The Oxford Series in Electrical and Computer Engineering .

ISBN: 978019513605

Subjects--Index Terms: Semiconductor Substrates, Unit Process, Thermal Oxidation, Ion Implantation, Optical Lithography

Dewey Class. No.: 621.38152

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