The Science and Engineering of Microelectronic Fabrication (Record no. 221170)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00601nam a22001817a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220518131457.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 210309b ||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 978019513605 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, A Stephen |
| 245 ## - TITLE STATEMENT | |
| Title | The Science and Engineering of Microelectronic Fabrication |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | New York |
| Name of publisher, distributor, etc. | Oxford University Press |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 603p. |
| 490 ## - SERIES STATEMENT | |
| Series statement | The Oxford Series in Electrical and Computer Engineering |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Semiconductor Substrates, Unit Process, Thermal Oxidation, Ion Implantation, Optical Lithography |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
No items available.