MEMS/NEMS handbook techniques and applications
Leondes,Cornelius T
MEMS/NEMS handbook techniques and applications - New York Springer Science+Business Media 2006 - vol.1, xviii,380p. vol.2,xviii,332p. vol.3,xv,434p. vol.4,xviii,386p. vol.5,xviii,556p.
Vol.1: Design methods in MEMS/NEMS.
Vol.2: Fabrication techniques.
Vol.3: Manufacturing methods.
Vol.4: Sensors & actuators.
Vol.5: Medical applications and MOEMS.
9780387245202
microelectromechanical systems - design and construction nanotechnology MEMS/NEMS
621.381 04 M / LEO
MEMS/NEMS handbook techniques and applications - New York Springer Science+Business Media 2006 - vol.1, xviii,380p. vol.2,xviii,332p. vol.3,xv,434p. vol.4,xviii,386p. vol.5,xviii,556p.
Vol.1: Design methods in MEMS/NEMS.
Vol.2: Fabrication techniques.
Vol.3: Manufacturing methods.
Vol.4: Sensors & actuators.
Vol.5: Medical applications and MOEMS.
9780387245202
microelectromechanical systems - design and construction nanotechnology MEMS/NEMS
621.381 04 M / LEO