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MEMS/NEMS handbook techniques and applications

By:

Leondes,Cornelius T [Editor]

Material type: Text

TextPublication details: New York Springer Science+Business Media 2006Description: vol.1, xviii,380p. vol.2,xviii,332p. vol.3,xv,434p. vol.4,xviii,386p. vol.5,xviii,556pISBN:

9780387245202

Subject(s):

microelectromechanical systems - design and construction nanotechnology MEMS/NEMS

DDC classification:

621.381 04 M LEO

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Vol.1: Design methods in MEMS/NEMS.
Vol.2: Fabrication techniques.
Vol.3: Manufacturing methods.
Vol.4: Sensors & actuators.
Vol.5: Medical applications and MOEMS.

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