Fundamentals of microfabrication and nanotechnology
Madou, Marc J
Fundamentals of microfabrication and nanotechnology - 3rd ed. - Boca Raton CRC Press 2012 - 3v.
V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to
Bio-MEMS and Bio-NEMS
978142005545
Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics
621.382:620.3 / MAD.1-.3 R
Fundamentals of microfabrication and nanotechnology - 3rd ed. - Boca Raton CRC Press 2012 - 3v.
V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to
Bio-MEMS and Bio-NEMS
978142005545
Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics
621.382:620.3 / MAD.1-.3 R