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Fundamentals of microfabrication and nanotechnology

By:

Madou, Marc J

Publication details: CRC Press 2012 Boca RatonEdition: 3rd edDescription: 3vISBN:

978142005545

Subject(s):

Microelectromechanical systems
Nano electromechanical systems
Microfluidics
Solidstate physics

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Holdings
Item type	Current library	Call number	Status	Barcode
Reference	University Library Reference	621.382:620.3 MAD.2 R (Browse shelf(Opens below))	Not for loan	00068816
Reference	University Library Reference	621.382:620.3 MAD.3 R (Browse shelf(Opens below))	Not for loan	00068817
Reference	University Library Reference	621.382:620.3 MAD.1 R (Browse shelf(Opens below))	Not for loan	00068815

V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to
Bio-MEMS and Bio-NEMS

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