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Plasma electronics

Makabe, Toshiaki

Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe and Zoran Lj Petrovic - 2nd ed. - New York CRC Press 2015 - xxxv, 376p.

ISBN: 9781482222050

Subjects--Index Terms: Plasma engineering Low temperature plasma Plasma processing

Universal Decimal Class. No.: 533.922 / MAK

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