Plasma electronics (Record no. 69370)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00622 a2200205 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20151026133352.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 150131b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781482222050 |
| 080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
| Universal Decimal Classification number | 533.922 |
| Item number | MAK |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Makabe, Toshiaki |
| 245 ## - TITLE STATEMENT | |
| Title | Plasma electronics |
| Remainder of title | applications in microelectronic device fabrication |
| Statement of responsibility, etc. | Toshiaki Makabe and Zoran Lj Petrovic |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Date of publication, distribution, etc. | 2015 |
| Name of publisher, distributor, etc. | CRC Press |
| Place of publication, distribution, etc. | New York |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxxv, 376p. |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Plasma engineering |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Low temperature plasma |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Plasma processing |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Petrovic, Zoran Lj; ed. by |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Date last seen | Cost, replacement price | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Universal Decimal Classification | University Library | University Library | 12/15/2014 | 0.00 | 533.922 MAK | 00072239 | 01/31/2015 | 0.00 | 12/15/2014 | Books |