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CMOS-MEMS

Brand, Oliver

CMOS-MEMS Oliver Brand and Gary K. Fedder - Germany Wiley-VCH Verlag 2013 - xiv, 594p. - Advanced micro and nanosystems .

ISBN: 9783527334995

Subjects--Index Terms: Integrated circuits design CMOS-MEMS-Biological and chemical application Microelectromechanical systems CMOS based sensors

Universal Decimal Class. No.: 621.3.049.77 / BRA

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