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CMOS-MEMS Oliver Brand and Gary K. Fedder

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Series: Advanced micro and nanosystemsPublication details: 2013 Wiley-VCH Verlag GermanyDescription: xiv, 594pISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	University Library	621.3.049.77 BRA (Browse shelf(Opens below))	Available		00072767

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