Laser microfabrication: thin film process and lithography (Record no. 246059)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00377nam a22001457a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0122334302 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.36/6 |
| Item number | EHR |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Ehrlich, Daniel J. |
| 245 ## - TITLE STATEMENT | |
| Title | Laser microfabrication: thin film process and lithography |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | Boston |
| Name of publisher, distributor, etc. | Academic Press |
| Date of publication, distribution, etc. | 1989 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 587p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Laser microfabrication |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Tsao,Jeffrey Y. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
No items available.