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Laser microfabrication: thin film process and lithography

By: Contributor(s): Material type: TextTextPublication details: Boston Academic Press 1989Description: 587pISBN:
  • 0122334302
Subject(s): DDC classification:
  • 621.36/6 EHR
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University Library
Cochin University of Science and Technology
Kochi-682 022, Kerala, India