Patterning of Material Layers in Submicron Region (Record no. 247911)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00302nam a2200121 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 8122405614 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 |
| Item number | TAN |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Tandon, U S |
| 245 ## - TITLE STATEMENT | |
| Title | Patterning of Material Layers in Submicron Region |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | New Delhi |
| Name of publisher, distributor, etc. | Wiley Eastern Limited |
| Date of publication, distribution, etc. | 1993 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 183p. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
No items available.