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Patterning of Material Layers in Submicron Region

By:

Tandon, U S

Material type: Text

Text

TextPublication details: New Delhi Wiley Eastern Limited 1993Description: 183pISBN:

8122405614

DDC classification:

621.381531 TAN

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University Library
Cochin University of Science and Technology
Kochi-682 022, Kerala, India