Ion implantation : (Record no. 266455)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00921cam a2200193 a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220519104956.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 940902s1995 maua b 001 0 eng |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815/2 |
| Item number | RIM |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0792395204 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Rimini, Emanuele |
| 9 (RLIN) | 7997 |
| 245 10 - TITLE STATEMENT | |
| Title | Ion implantation : |
| Remainder of title | basics to device fabrication / |
| Statement of responsibility, etc. | by Emanuele Rimini. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | Boston : |
| Name of publisher, distributor, etc. | Kluwer Academic Publishers, |
| Date of publication, distribution, etc. | c1995. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 393 p. : |
| Other physical details | ill. ; |
| Dimensions | 25 cm. |
| 490 1# - SERIES STATEMENT | |
| Series statement | The Kluwer international series in engineering and computer science ; |
| Volume/sequential designation | SECS 293. |
| Series statement | Electronic materials, science and technology |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Ion implantation |
| -- | Semiconductor doping |
| -- | Semiconductors--Design and construction |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Kluwer international series in engineering and computer science ; |
| Volume number/sequential designation | SECS 293. |
| 9 (RLIN) | 5844 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Kluwer international series in engineering and computer science. |
| Name of part/section of a work | Electronic materials, science and technology. |
| 9 (RLIN) | 5845 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
No items available.