Ion implantation : basics to device fabrication / by Emanuele Rimini.
Material type: TextSeries: Kluwer international series in engineering and computer science ; SECS 293. | Kluwer international series in engineering and computer science. Electronic materials, science and technology.Publication details: Boston : Kluwer Academic Publishers, c1995.Description: xii, 393 p. : ill. ; 25 cmISBN:- 0792395204
- 621.3815/2 RIM
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