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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators / Ian W. Boyd.

By: Material type: TextTextSeries: Springer series in materials science ; v. 3.Publication details: Berlin ; Springer-Verlag, c1987.Description: viii, 320 p. : 77 ill. ; 24 cmISBN:
  • 0387179518
Subject(s): DDC classification:
  • 621.36/6 BOY
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Cochin University of Science and Technology
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