Advanced Micro & Nanosystems CMOS-MEMS

Material type: TextTextSeries: ; Volume 2Publication details: Germany WILEY-VCHEdition: Editors O Brand & G K FedderDescription: 594pISBN:
  • 9783527310807
Subject(s): DDC classification:
  • 621.3815
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Cochin University of Science and Technology
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