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Electroceramic based MEMS fabricatic technology and application

By: Contributor(s):
Material type: TextTextPublication details: New York Springer 2005Edition: Description: xii, 414pISBN:
  • 0-387-23310-5
ISSN:
Subject(s): DDC classification:
  • 621.38
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University Library
Cochin University of Science and Technology
Kochi-682 022, Kerala, India