Fundamentals of microfabrication and nanotechnology
Publication details: CRC Press 2012 Boca RatonEdition: 3rd edDescription: 3vISBN:- 978142005545
V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to
Bio-MEMS and Bio-NEMS
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