Glow discharge processes: sputtering and plasema etching
Material type: TextPublication details: New York John Wiley 1980Edition: Description: xv, 406 pISBN:- 537.525
Item type | Current library | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|
Books | University Library | 537.525 CHA (Browse shelf(Opens below)) | Available | 00033197 |
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