Silicon nitride for microelectronic applications,
Milek, John T.
Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices. [by] John T. Milek. - New York, IFI/Plenum, 1971-72. - 6 v. illus. 28 cm. - Handbook of electronic materials, v. 3, 6 . - Handbook of electronic materials ; v. 3, etc. .
0306671034
Microelectronics--Materials. Silicon nitride
621.381/7 / MIL
Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices. [by] John T. Milek. - New York, IFI/Plenum, 1971-72. - 6 v. illus. 28 cm. - Handbook of electronic materials, v. 3, 6 . - Handbook of electronic materials ; v. 3, etc. .
0306671034
Microelectronics--Materials. Silicon nitride
621.381/7 / MIL