Silicon nitride for microelectronic applications, [by] John T. Milek. 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.

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Material type: Text

TextSeries: Handbook of electronic materials ; v. 3, etc.Publication details: New York, IFI/Plenum, 1971-72.Description: 6 v. illus. 28 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	Department of Physics	621.381/7 MIL.6 (Browse shelf(Opens below))	Available		PHY004094
Books	Department of Physics	621.381/7 MIL.3 (Browse shelf(Opens below))	Available		PHY004092

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