Silicon nitride for microelectronic applications, (Record no. 148460)
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000 -LEADER | |
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fixed length control field | 00754cam a2200181 4500 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20160318124854.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 710513m19711972nyua b 000 0 eng |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.381/7 |
Item number | MIL |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0306671034 |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | Milek, John T. |
9 (RLIN) | 4594 |
245 10 - TITLE STATEMENT | |
Title | Silicon nitride for microelectronic applications, |
Statement of responsibility, etc. | [by] John T. Milek. |
Remainder of title | 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc. | New York, |
Name of publisher, distributor, etc. | IFI/Plenum, |
Date of publication, distribution, etc. | 1971-72. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 6 v. |
Other physical details | illus. |
Dimensions | 28 cm. |
490 1# - SERIES STATEMENT | |
Series statement | Handbook of electronic materials, v. 3, 6 |
653 ## - INDEX TERM--UNCONTROLLED | |
Uncontrolled term | Microelectronics--Materials. |
-- | Silicon nitride |
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
Uniform title | Handbook of electronic materials ; |
Volume number/sequential designation | v. 3, etc. |
9 (RLIN) | 4593 |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Books |
Withdrawn status | Lost status | Source of classification or shelving scheme | Materials specified (bound volume or other part) | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
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Dewey Decimal Classification | v 6 | Department of Physics | Department of Physics | 02/20/2010 | 621.381/7 MIL.6 | PHY004094 | 02/20/2010 | 02/20/2010 | Books | |||||
Dewey Decimal Classification | v 3 | Department of Physics | Department of Physics | 02/20/2010 | 621.381/7 MIL.3 | PHY004092 | 02/20/2010 | 02/20/2010 | Books |