Laser diagnostics and photochemical processing for semiconductor devices :
Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /
editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
- New York : North-Holland, c1983.
- xiii, 298 p. : ill. ; 24 cm.
- Material research society symposia proceedings; v. 17 .
"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
0444007822
Lasers--Industrial applications--Congresses. Semiconductors--Congresses.
621.3815/2 / OSG
"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
0444007822
Lasers--Industrial applications--Congresses. Semiconductors--Congresses.
621.3815/2 / OSG