Laser diagnostics and photochemical processing for semiconductor devices : (Record no. 265404)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00989pam a2200217 a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220519104627.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 830408s1983 nyua b 101 0 eng |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815/2 |
| Item number | OSG |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0444007822 |
| 245 00 - TITLE STATEMENT | |
| Title | Laser diagnostics and photochemical processing for semiconductor devices : |
| Remainder of title | symposium held November 1982 in Boston, Massachusetts, U.S.A. / |
| Statement of responsibility, etc. | editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | North-Holland, |
| Date of publication, distribution, etc. | c1983. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiii, 298 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Material research society symposia proceedings; |
| Volume/sequential designation | v. 17 |
| 500 ## - GENERAL NOTE | |
| General note | "Sponsored by the Air Force Office of Scientific Research"--T.p. verso. |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Lasers--Industrial applications--Congresses. |
| -- | Semiconductors--Congresses. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Osgood, R. M., ed. |
| 9 (RLIN) | 4381 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Brueck, S. R. J., ed. |
| 9 (RLIN) | 4382 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Schlossberg, H. R., ed. |
| 9 (RLIN) | 4383 |
| 710 1# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | United States. |
| Subordinate unit | Air Force. |
| -- | Office of Scientific Research. |
| 9 (RLIN) | 4384 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
No items available.