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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.

Contributor(s): Material type: TextTextSeries: Material research society symposia proceedings ; v. 17Publication details: New York : North-Holland, c1983.Description: xiii, 298 p. : ill. ; 24 cmISBN:
  • 0444007822
Subject(s): DDC classification:
  • 621.3815/2 OSG
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"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.

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