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Selected papers on resolution enhancement techniques in optical lithography-Bellingham

Schellenberg, F.M. [ed.]

Selected papers on resolution enhancement techniques in optical lithography-Bellingham - Washington SPIE Press 2004 - xx, 875p. - (SPIE milestone series v.178) .

ISBN: 0-8194-5166-5

Subjects--Index Terms: Integrated circuits-design and construction Microlithography Photolithography semiconductors-Etching Optical lithography

Universal Decimal Class. No.: 621.3.049.77 / SCH

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