Selected papers on resolution enhancement techniques in optical lithography-Bellingham

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Material type: Text

TextSeries: (SPIE milestone series v.178)Publication details: Washington SPIE Press 2004 Description: xx, 875pISBN:

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Item type	Current library	Call number	Status	Date due	Barcode
Books	University Library	621.3.049.77 SCH (Browse shelf(Opens below))	Available		00053942

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