Selected papers on resolution enhancement techniques in optical lithography-Bellingham (Record no. 3254)
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|---|---|
| fixed length control field | 00648nam a22001697a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20151026130326.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 091019t xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0-8194-5166-5 |
| 080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
| Universal Decimal Classification number | 621.3.049.77 |
| Item number | SCH |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Schellenberg, F.M. [ed.] |
| Relator term | ed. by |
| 9 (RLIN) | 7461 |
| 245 ## - TITLE STATEMENT | |
| Title | Selected papers on resolution enhancement techniques in optical lithography-Bellingham |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | Washington |
| Name of publisher, distributor, etc. | SPIE Press |
| Date of publication, distribution, etc. | 2004 |
| -- | 7462 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xx, 875p. |
| 490 ## - SERIES STATEMENT | |
| Series statement | (SPIE milestone series v.178) |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Integrated circuits-design and construction |
| -- | Microlithography |
| -- | Photolithography |
| -- | semiconductors-Etching |
| -- | Optical lithography |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Universal Decimal Classification | University Library | University Library | 10/19/2009 | 621.3.049.77 SCH | 00053942 | 10/19/2009 | 10/19/2009 | Books |