Preparation and characterization of high-k aluminium oxide thin films by atomic layer deposition for gate dielectric applications (Record no. 65734)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00713nam a22001817a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20151026133227.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 121217t xxu||||| |||| 00| 0 eng d |
| 080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
| Universal Decimal Classification number | 537.226:539.23 |
| Item number | ANU T |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Anu philip |
| 9 (RLIN) | 22397 |
| 245 ## - TITLE STATEMENT | |
| Title | Preparation and characterization of high-k aluminium oxide thin films by atomic layer deposition for gate dielectric applications |
| Statement of responsibility, etc. | Anu Philip; guided by K. Rajeev Kumar |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | Kochi |
| Name of publisher, distributor, etc. | Department of Instrumentations; Cusat |
| Date of publication, distribution, etc. | 2011 |
| -- | 22398 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 202p. |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Dielectronics - high K-materials |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Atomic layer deposition of Aluminium oxide thin films |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | MOS Capacitors |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Rajeev Kumar, K; guided by |
| 9 (RLIN) | 22396 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Theses |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Universal Decimal Classification | Not For Loan | University Library | University Library | Reference | 12/17/2012 | 537.226:539.23 ANU T | T0000555 | 12/17/2012 | 12/17/2012 | Theses |