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Nanolithography and patterning techniques in microelectronics / edited by David G. Bucknall. Project Report

By: Contributor(s): Material type: TextTextPublication details: Cambridge : Woodhead Pub. ; Boca Raton, FL : CRC Press, c2005.Description: xiv, 409 p. : ill. ; 24 cmISBN:
  • 1855739313 (Woodhead)
  • 0849334470 (CRC)
  • 1845690907 (ebook)
  • 9781855739314
Subject(s): DDC classification:
  • 621.3815/31 BUC
Online resources:
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Item type Current library Call number Status Date due Barcode
Reference Reference Department of Applied Chemistry Reference 621.3815/31,BUC (Browse shelf(Opens below)) Not for loan CHE3785

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