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Fundamentals of microfabrication and nanotechnology

By:

Madou, Marc J

Publication details: CRC Press 2012 Boca RatonEdition: 3rd edDescription: 3vISBN:

978142005545

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Item type	Current library	Call number	Status	Barcode
Reference	University Library Reference	621.382:620.3 MAD.2 R (Browse shelf(Opens below))	Not for loan	00068816
Reference	University Library Reference	621.382:620.3 MAD.3 R (Browse shelf(Opens below))	Not for loan	00068817
Reference	University Library Reference	621.382:620.3 MAD.1 R (Browse shelf(Opens below))	Not for loan	00068815

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Previous	621.382:547.1:535.14(035) NAL.2 Handbook of organic electronics and photonics	621.382:547.1:535.14(035) NAL.3 Handbook of organic electronics and photonics	621.382:620.3 MAD.1 R Fundamentals of microfabrication and nanotechnology	621.382:620.3 MAD.2 R Fundamentals of microfabrication and nanotechnology	621.382:620.3 MAD.3 R Fundamentals of microfabrication and nanotechnology	621.382:681.7 HAI.1 R Handbook of instrumentation and techniques for semiconductor nanostructure characterization	621.382:681.7 HAI.2 R Handbook of instrumentation and techniques for semiconductor nanostructure characterization	Next

V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to
Bio-MEMS and Bio-NEMS

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