Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe and Zoran Lj Petrovic

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Publication details: 2015 CRC Press New YorkEdition: 2nd edDescription: xxxv, 376pISBN:

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Item type	Current library	Call number	Status	Date due	Barcode
Books	University Library	533.922 MAK (Browse shelf(Opens below))	Available		00072239

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Previous	533.9.082.74 PLA.2 Plasma electrodynamics	533.9.13 ION Ion-molecule reactions	533.92. 2 MAX Proceedings: Ion surface interaction sputtering and related phenomena	533.922 MAK Plasma electronics	533.93 ICH.1 Statistical plasma physics	533.93 MIK Theory of plasma instabilities	533.95 HOR Chaos and structures in nonlinear plasmas	Next

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