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Silicon nitride for microelectronic applications, [by] John T. Milek. 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.
Material type:
TextSeries: Handbook of electronic materials ; v. 3, etc.Publication details: New York, IFI/Plenum, 1971-72.Description: 6 v. illus. 28 cmISBN: - 0306671034
- 621.381/7 MIL
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Department of Physics | 621.381/7 MIL.6 (Browse shelf(Opens below)) | Available | PHY004094 | |
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Department of Physics | 621.381/7 MIL.3 (Browse shelf(Opens below)) | Available | PHY004092 |
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| 621.3817 MIL Microelectronics | 621.3817 MIL;1 Microelectronics | 621.381/7 MIL.3 Silicon nitride for microelectronic applications, | 621.381/7 MIL.6 Silicon nitride for microelectronic applications, | 621.381/7 NEM Thin films: | 621.3817 RAZ RF microelectronics | 621.381/7 STE Fundamentals of microelectronics / |
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