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Selected papers on resolution enhancement techniques in optical lithography-Bellingham
Material type:
TextSeries: (SPIE milestone series v.178)Publication details: Washington SPIE Press 2004 Description: xx, 875pISBN: - 0-8194-5166-5
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University Library | 621.3.049.77 SCH (Browse shelf(Opens below)) | Available | 00053942 |
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| 621.3.049.77 SAN Digital concepts using standards integrated circuits | 621.3.049.77 SAN;1 Digital concepts using standard integrated circuits | 621.3.049.77 SCA Printed circuit boards for microelectronics | 621.3.049.77 SCH Selected papers on resolution enhancement techniques in optical lithography-Bellingham | 621.3.049.77 SEM Molecular and nano electronics: analysis design and simulation | 621.3.049.77 SES R IC schematic source master | 621.3.049.77 SHM Computer arithmetics for nanoelectronics |
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